Large Stage IC Inspection Microscope

Reflected and transmitted light illuminator for Inspection of large wafer and photo marks in the IC industry.
The microscopes is equipped with a large size mechanical stage, smooth movement of ball bearing guides having low coaxial controls for x-y movement.
Objectives : M5x-M10x, M20x and M50x.Eye pieces :
WF10x and WF 15x. Magnification : 50x to 750x.